Thin Section Bearings Powering the Advancement of Semiconductor Intelligent Equipment
Against the backdrop of the evolution of semiconductor manufacturing towards high precision and high integration, the performance of precision motion components directly determines equipment stability and yield rates. Leveraging advantages such as compact structure, uniform cross-section, and lightweight design, Thin Section Bearings (Imperial Series) have become a core supporting component for semiconductor intelligent equipment.
Their imperial specifications are compatible with international mainstream equipment interface standards, making them highly adaptable to key mechanisms like air-bearing platforms, wafer transfer arms, and lithography machine workpiece stages. Cross-sectional consistency increases installation space utilization by over 30%, meeting the demands of equipment miniaturization and modular design. Their balanced radial/axial stiffness characteristics suppress micro-vibrations during high-speed reciprocating motion, ensuring nanometer-level positioning accuracy. Meanwhile, the thin-walled structure reduces rotational inertia; combined with low-friction sealing designs, it significantly cuts energy consumption and mitigates particle contamination risks—aligning with cleanroom environmental requirements.
Addressing the demands of semiconductor equipment for long service life and maintenance-free operation, this series of bearings employs vacuum-compatible materials and precision grinding processes to achieve low starting torque and high dynamic response, supporting 7×24-hour continuous operation. Currently, they have been deployed in bulk across etching machines, inspection equipment, and advanced packaging lines, thereby enhancing motion system reliability and providing critical basic components for the precision and intelligent upgrading of semiconductor equipment.
Our company, Luoyang BOBI Precision Bearing Co., Ltd., produces thin-section ball bearings, including Imperial thin-section open bearings and Imperial thin-section sealed bearings. These feature inner diameters ranging from 1 inch (25.4 mm) to 40 inches (1016 mm), with sealed bearings having a maximum inner diameter of 20 inches (508 mm). Product precision can be tailored to P0, P6, P5, P4, or P2 grade levels as required.
